Equipment Failure Analysis


SEM/EDX

SEM EDX System

JOEL (SEM) / Oxford (EDX)

  • SEM resolution: 4.0 nm @ 30 kV
  • EDX resolution: 137 eV @ 5.9 keV
  • Acceleration Voltage: 0.5 - 30 kV
  • Stage movements: 10 mm × 20 mm